| The purpose of this invitation is to obtain competitive offers from suppliers who can supply and install an Reactive Ion Etcher (RIE) in the Australian National Fabrication Facility Queensland (ANFFQ) cleanroom located at St Lucia campus to enhance its existing etching capabilities for advanced dry etching of silicon and glass devices.
Established under the National Collaborative Research Infrastructure Strategy, the Australian National Fabrication Facility links eight university-based nodes to provide researchers and industry with access to state-of-the-art fabrication facilities.
The nodes, which are located across Australia, draw on existing infrastructure and expertise. Each offers a specific area of expertise including advanced materials, nano electronics & photonics and bio nano applications. The University of Queensland’s commitment to providing a world-class user facility is underpinned by the sharing of best practice in service provision across the nodes.
ANFFQ is the Queensland based node located at both the University of Queensland and Griffith University. The University of Queensland wish to procure a Reactive Ion Etcher (RIE) for its UQ facility to enhance its existing etch capabilities. The system will become a core etching tool within the ANFFQ cleanroom and will be used on a daily basis by the majority of cleanroom users. Currently the ANFFQ has 50 active cleanroom users.
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