| The Centre for Microscopy and Microanalysis at The University of Queensland (UQ) is looking to procure a solution for the dedicated high-resolution e-beam lithography (EBL) patterning and inspection in a wide range types of resists and for a diverse range of applications.
The EBL system(s) will be a key infrastructure platform that will support fundamental and applied research across a number of disciplines at UQ including Physics, Chemistry, NanoBio-technology, Material Science, and Engineering. The proposed instrument(s) will be versatile and, as such, will provide UQ researchers the technical capability to compete with leading international researchers in the area of quantum nanoscience, and across other fields. This type of instrument(s) will provide UQ with frontier research capabilities which are essential to research groups and centres at UQ.
The instrument(s) will be available for a range of users (most typically post graduate students and early career researchers) across Queensland, with a range of prior experience and knowledge in EBL methods, and will provide much needed resources and capacity in this advanced technology.
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