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For the supply, delivery and install of an Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) system  

The University of Queensland
St Lucia, QLD, Australia, 4072
UQ2134
For the supply, delivery and install of an Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) system (UQ2134)
Goods and Services
For the supply, delivery and install of an Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) system

The Australian National Fabrication Facility – QLD node (ANFFQ), within the Australian Institute for Bioengineering and Nanotechnology (AIBN) at The University of Queensland (UQ) requires a new etcher to enhance its fabrication capability. Etching process is a critical process to define the 3D structure of devices.

The new ICP RIE system will be able to etch silicon, silicon based dielectrics and metal (Al) which provides more flexibility for etching processes. It is desirable for the system to have ability to also etch glass. This new machine is essential to make devices like electronics or MEMS.  This new machine will assist UQ researchers with different applications especially for nanoscale devices. 

Key dates:

  • Individual Supplier discussions session (optional): Sessions are scheduled for Thursday 11 November and/or Friday 12 November 2021. Please register your interest in an individual session with the Technical and General UQ Contacts as soon as possible.by no later than Wednesday, 10 November 2021. 
  • Closing date for questions: Wednesday, 24 November 2021, 12PM (AEST).
  • Closing date for responses: Wednesday, 1 December 2021, 12 PM (AEST)
1 Dec, 2021
Laboratory and scientific equipment - (100%)
limited offer process
No
$902,143 (Estimate)
South East Queensland
28 Mar, 2022
4
Tahlia Bourke (DISABLED)
OFFICE: (07) 33653354

Contractors

Nano Vacuum Pty Ltd
Suite 504, F78, 24-32 Lexington Drive, Bella Vista, NSW, Australia, 2153
Price: $ 0.00